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Electronically integrated, mass-manufactured, microscopic robots

Marc Z. Miskin, Alejandro J. Cortese, Kyle Dorsey, Edward P. Esposito, Michael F. Reynolds, Qingkun Liu, Michael Cao, David A. Muller, Paul L. McEuen & Itai Cohen

Electronically integrated, mass-manufactured, microscopic robots. Nature 584, 557–561 (2020). https://doi.org/10.1038/s41586-020-2626-9