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Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms

Kyle J. Dorsey, Tanner G. Pearson, Edward Esposito, Sierra Russell, Baris Bircan, Yimo Han, Marc Z. Miskin, David A. Muller, Itai Cohen, Paul L. McEuen. Advanced Materials (2019). doi.org/10.1002/adma.201901944